Eurostars is a programme that supports research-performing small and medium enterprises, which develop innovative products, processes and services, to gain competitive advantage.

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MASSMICRO - Mass Manufacturing of novel 3D shaped Micro-Components based on LIGA Technology

The state of the art of LIGA processes allow for high aspect ratios, high sidewall quality, extreme precision and 2D design freedom. Based on this background, the MASSMICRO project advances three key innovations, namely:

  • parts in unprecedented 3D geometries through laser lithography and combination of 2D and 3D lithography
  • new materials such as stainless steel and advaned gold systems by electrodeposition processes
  • economic batch sizes of up to 1.000.000 parts through a mass replication approach

 By combining these three achievements, novel miniature components for microelectronic test equipment, watch-making but also automotive, aerospace and medical implements become viable.